PyJEM.TEM3.__deflector

class PyJEM.TEM3.__deflector.Def3(*args, **kw)

Bases: _DummyTEM3Accessor

GetAngBal()

Get AngleBalance value. this returns I/O output value.

Returns:

  • x (int) : 0-65535

  • y (int) : 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetAngBal()
(8000,8000)
GetBeamBlank()

Get the beam blanking status.

Returns:

Beam blanking status.

index

Description

0

OFF

1

ON

Return type:

int

Warning

Branking method is defined on machine side.

Example

>>> TEM3.Def3().GetBeamBlank()
0
GetCLA1()

Get CLAlignment1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetCLA1()
(8000,8000)
GetCLA2()

Get CLAlignment2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetCLA2()
(8000,8000)
GetCLs()

Get CLStig value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetCLs()
(8000,8000)
GetCorrection()

Get Correction value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetCorrection()
(8000,8000)
GetDefInfo(index)

Get select deflector value. this returns I/O output value.

Parameters:

index (int) –

Deflector index.

index

Description

0

GUN1

1

GUN2

2

CLA1

3

CLA2

4

CMP-S

5

CMP-T

6

CMT-A

7

CLS

8

ISC1

9

ISC2

10

SPA

11

PLA

12

OLS

13

ILS

14

FLS1

15

FLS2

16

FLA1

17

FLA2

18

SCAN1

19

SCAN2

20

IS-ASID

21

MAG-ADJ

22

ROTATION

23

CORRECTION

24

OFFSET

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetDefInfo(1)
(8000,8000)
GetDetAlign(index)

Get Alignment value for detector. this returns I/O output value.

Parameters:

index (int) –

Detector index. See Detector Index for the mapping.

index

Description

1

SEI

2

EDS

3

BI-PRISM

4

DFI-EF

5

TVCAM-U

6

SSCAM-U

7

FARADAY-CAGE

8

BS

9

HRD

10

DFI-U

11

BFI-U

12

SCR-F

13

SCR-L

14

DFI-B

15

BFI-B

16

SSCAM-B

17

TVCAM-B

18

EELS

19

TVCAM-GIF

20

SSCAM-GIF

21

BEI-TOPO

22

BEI-COMPO

23

SEI-TOPO

24

SEI-COMPO

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetDetAlign(1)
(8000,8000)
GetFLA1()

Get FLAlignment1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetFLA1()
(8000,8000)
GetFLA2()

Get FLAlignment2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetFLA2()
(8000,8000)
GetFLs1()

Get FLStig1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetFLs1()
(8000,8000)
GetFLs2()

Get FLStig2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetFLs2()
(8000,8000)
GetGunA1()

Get GunAlignment1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetGunA1()
(8000,8000)
GetGunA2()

Get GunAlignment2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetGunA2()
(8000,8000)
GetILs()

Get ILStig value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetILs()
(8000,8000)
GetIS1()

Get ImageShift1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetIS1()
(8000,8000)
GetIS2()

Get ImageShift2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetIS2()
(8000,8000)
GetMagAdjust()

Get MagAdjust value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetMagAdjust()
(8000,8000)
GetOLs()

Get OLStig value. this returns I/O output value or OLS value on LM.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetOLs()
(8000,8000)
GetOffset()

Get Offset value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetOLs()
(8000,8000)
GetPLA()

Get PLAlign value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetPLA()
(8000,8000)
GetRotation()

Get Rotation value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetRotation()
(8000,8000)
GetScan1()

Get SCAN1 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetScan1()
(8000,8000)
GetScan2()

Get SCAN2 value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetScan2()
(8000,8000)
GetShifBal()

Get ShiftBalance value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetShifBal()
(8000,8000)
GetSpotA()

Get SpotAlignment value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetSpotA()
(8000,8000)
GetStemIS()

Get IS value for ASID. The variable corresponds to IS value overlapped to CLA

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetStemIS()
(8000,8000)
GetTiltBal()

Get TiltBalance value. this returns I/O output value.

Returns:

A tuple (x, y) index.:

  • x (int): x value. range is 0-65535

  • y (int): y value. range is 0-65535

Return type:

list

Example

>>> TEM3.Def3().GetTiltBal()
(8000,8000)
SetAngBal(x, y)

Set AngleBalance value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – range is 0-65535.

  • y (int) – range is 0-65535.

Return type:

None

Example

>>> TEM3.Def3().SetAngBal(8000,8000)
SetBeamBlank(status)

Set the beam blanking status.

Parameters:

status (int) –

blanking status.

  • 0=OFF

  • 1=ON.

Return type:

None

Warning

Branking method is defined on machine side.

Example

>>> TEM3.Def3().SetBeamBlank(1)   # Blanking on
SetCLA1(x, y)

Set CLAlignment1 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetCLA1(8000,8000)
SetCLA2(x, y)

Set CLAlignment2 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetCLA2(8000,8000)
SetCLs(x, y)

Set CLStig value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetCLs(8000,8000)
SetDetAlign(detector, x, y)

Set Alignment value for detector. The variable corresponds to I/O output value.

Parameters:

  • detector (int) –

    Detector index. See Detector Index for the mapping.

    index

    Description

    1

    SEI

    2

    EDS

    3

    BI-PRISM

    4

    DFI-EF

    5

    TVCAM-U

    6

    SSCAM-U

    7

    FARADAY-CAGE

    8

    BS

    9

    HRD

    10

    DFI-U

    11

    BFI-U

    12

    SCR-F

    13

    SCR-L

    14

    DFI-B

    15

    BFI-B

    16

    SSCAM-B

    17

    TVCAM-B

    18

    EELS

    19

    TVCAM-GIF

    20

    SSCAM-GIF

    21

    BEI-TOPO

    22

    BEI-COMPO

    23

    SEI-TOPO

    24

    SEI-COMPO

  • x (int) – Input range: 0-65535

  • y (int) – Input range: 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetDetAlign(5,8000,8000)
SetFLA1(x, y)

Set FLAlignment1 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetFLA1(8000,8000)
SetFLA2(x, y)

Set FLAlignment2 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetFLA2(8000,8000)
SetFLs1(x, y)

Set FLStig1 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetFLs1(8000,8000)
SetFLs2(x, y)

Set FLStig2 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetFLs2(8000,8000)
SetGunA1(x, y)

Set GunAlignment1 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().GunAlignment1(8000,8000)
SetGunA2(x, y)

Set GunAlignment2 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().GunAlignment2(8000,8000)
SetILs(x, y)

Set ILStig value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetILs(8000,8000)
SetIS1(x, y)

Set ImageShift1 value. The variable corresponds to I/O output value. IS on imaging system.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetILs(8000,8000)
SetIS2(x, y)

Set ImageShift2 value. The variable corresponds to I/O output value. IS on imaging system.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetIS2(8000,8000)
SetNtrl(index)

NTRL of the region which is being accessed.

Parameters:

index (int) –

Deflector index.

index

Description

0

GUN1

1

GUN2

2

CLA1

3

CLA2

4

CMP-S

5

CMP-T

6

CMT-A

7

CLS

8

ISC1

9

ISC2

10

SPA

11

PLA

12

OLS

13

ILS

14

FLS1

15

FLS2

16

FLA1

17

FLA2

18

SCAN1

19

SCAN2

20

IS-ASID

21

MAG-ADJ

22

ROTATION

23

CORRECTION

24

OFFSET

Return type:

None

Example

>>> TEM3.Def3().SetNtrl(2)
SetOLs(x, y)

Set OLStig value. The variable corresponds to I/O output value. Set OLS for LM.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetOLs(8000,8000)
SetPLA(x, y)

Set PLAlign value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetPLA(8000,8000)
SetScan1(x, y)

Set SCAN1 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetScan1(8000,8000)
SetScan2(x, y)

Set SCAN2 value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetScan2(8000,8000)
SetShifBal(x, y)

Set ShiftBalance value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetShifBal(8000,8000)
SetSpotA(x, y)

Set SpotAlignment value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Example

>>> TEM3.Def3().SetSpotA(8000,8000)
SetStemA1CoarseRel(x, y)

Increase or decrease A1 Coarse value for STEM.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetStemA1CoarseRel(8000,8000)
SetStemBeamTiltRel(x, y)

Increase or decrease Beam Tilt value for STEM.

Parameters:

  • x (int) – input range : 0-65535

  • y (int) – input range : 0-65535

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetStemBeamTiltRel(8000,8000)
SetStemIS(x, y)

Set IS value for ASID. The variable corresponds to IS value overlapped to CLA.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Example

>>> TEM3.Def3().SetStemIS(8000,8000)
SetStemStigA1Rel(x, y)

Increase or decrease Stig A1 value for STEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetStemStigA1Rel(8000,8000)
SetStemStigB2Rel(x, y)

Increase or decrease Stig B2 value for STEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetStemStigB2Rel(8000,8000)
SetStemUserBShiftRel(x, y)

Increase or decrease User B Shift value for STEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetStemUserBShiftRel(8000,8000)
SetTemA1CoarseRel(x, y)

Increase or decrease A1 value for TEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetTemA1CoarseRel(8000,8000)
SetTemDShiftRel(x, y)

Increase or decrease D Shift value for TEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetTemDShiftRel(8000,8000)
SetTemDiStigRel(x, y)

Increase or decrease Di Stig value for TEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetTemDiStigRel(8000,8000)
SetTemStigA1Rel(x, y)

Increase or decrease Stig A1 value for TEM.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Note

This works for ARM200F.

Example

>>> TEM3.Def3().SetTemStigA1Rel(8000,8000)
SetTiltBal(x, y)

Set TiltBalance value. The variable corresponds to I/O output value.

Parameters:

  • x (int) – input range : 0-65535.

  • y (int) – input range : 0-65535.

Return type:

None

Example

>>> TEM3.Def3().SetTiltBal(8000,8000)