PyJEM.TEM3 Interface Reference

This notebook provides a version compatibility reference for PyJEM.TEM3.

For each class and method in PyJEM.TEM3, the table shows which PyJEM versions support it.

The classes covered are:

• Apt3 — Aperture control

• Camera3 — Camera and shutter control

• Def3 — Deflector control

• EOS3 — Electron Optical System (magnification, mode, focus)

• FEG3 — Field emission gun control

• Filter3 — Energy filter control

• GUN3 — Electron gun control

• HT3 — High tension control

• Lens3 — Lens control

• MDS3 — MDS control

• Nitrogen3 — Nitrogen system control

• Scan3 — Scan control

• Stage3 — Stage control

• VACUUM3 — Vacuum system control

Apt3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetExpKind	〇	〇	〇	〇	〇
GetExpSize	〇	〇	〇	〇	〇
GetKind	〇	〇	〇	〇	〇
GetPhasePlateState	〇	〇	〇	〇	〇
GetPosition	〇	〇	〇	〇	〇
GetSize	〇	〇	〇	〇	〇
SelectExpKind	〇	〇	〇	〇	〇
SelectKind	〇	〇	〇	〇	〇
SetExpSize	〇	〇	〇	〇	〇
SetPhasePlateToNext	〇	〇	〇	〇	〇
SetPosition	〇	〇	〇	〇	〇
SetSize	〇	〇	〇	〇	〇

Camera3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
ExposeShutter	〇	〇	〇	〇	〇
GetCurrentDensity	〇	〇	〇	〇	〇
GetExpTime	〇	〇	〇	〇	〇
GetFilmLoadingMode	〇	〇	〇	〇	〇
GetMode	〇	〇	〇	〇	〇
GetPhotoMode	〇	〇	〇	〇	〇
GetShutterPosition	〇	〇	〇	〇	〇
GetStatus	〇	〇	〇	〇	〇
GetUnused	〇	〇	〇	〇	〇
SelectFilmLoadingMode	〇	〇	〇	〇	〇
SelectMode	〇	〇	〇	〇	〇
SetExpTime	〇	〇	〇	〇	〇
SetShutterPosition	〇	〇	〇	〇	〇

Def3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetAngBal	〇	〇	〇	〇	〇
GetBeamBlank	〇	〇	〇	〇	〇
GetCLA1	〇	〇	〇	〇	〇
GetCLA2	〇	〇	〇	〇	〇
GetCLs	〇	〇	〇	〇	〇
GetCorrection	〇	〇	〇	〇	〇
GetDefInfo	〇	〇	〇	〇	×
GetDetAlign	〇	〇	〇	〇	〇
GetFLA1	〇	〇	〇	〇	〇
GetFLA2	〇	〇	〇	〇	〇
GetFLs1	〇	〇	〇	〇	〇
GetFLs2	〇	〇	〇	〇	〇
GetGunA1	〇	〇	〇	〇	〇
GetGunA2	〇	〇	〇	〇	〇
GetILs	〇	〇	〇	〇	〇
GetIS1	〇	〇	〇	〇	〇
GetIS2	〇	〇	〇	〇	〇
GetMagAdjust	〇	〇	〇	〇	〇
GetOffset	〇	〇	〇	〇	〇
GetOLs	〇	〇	〇	〇	〇
GetPLA	〇	〇	〇	〇	〇
GetRotation	〇	〇	〇	〇	〇
GetScan1	〇	〇	〇	〇	〇
GetScan2	〇	〇	〇	〇	〇
GetShifBal	〇	〇	〇	〇	〇
GetSpotA	〇	〇	〇	〇	〇
GetStemIS	〇	〇	〇	〇	〇
GetTiltBal	〇	〇	〇	〇	〇
SetAngBal	〇	〇	〇	〇	〇
SetBeamBlank	〇	〇	〇	〇	〇
SetCLA1	〇	〇	〇	〇	〇
SetCLA2	〇	〇	〇	〇	〇
SetCLs	〇	〇	〇	〇	〇
SetDetAlign	〇	〇	〇	〇	〇
SetFLA1	〇	〇	〇	〇	〇
SetFLA2	〇	〇	〇	〇	〇
SetFLs1	〇	〇	〇	〇	〇
SetFLs2	〇	〇	〇	〇	〇
SetGunA1	〇	〇	〇	〇	〇
SetGunA2	〇	〇	〇	〇	〇
SetILs	〇	〇	〇	〇	〇
SetIS1	〇	〇	〇	〇	〇
SetIS2	〇	〇	〇	〇	〇
SetNtrl	〇	〇	〇	〇	〇
SetOLs	〇	〇	〇	〇	〇
SetPLA	〇	〇	〇	〇	〇
SetScan1	〇	〇	〇	〇	〇
SetScan2	〇	〇	〇	〇	〇
SetShifBal	〇	〇	〇	〇	〇
SetSpotA	〇	〇	〇	〇	〇
SetStemA1CoarseRel	〇	〇	〇	〇	〇
SetStemBeamTiltRel	〇	〇	〇	〇	〇
SetStemIS	〇	〇	〇	〇	〇
SetStemStigA1Rel	〇	〇	〇	〇	〇
SetStemStigB2Rel	〇	〇	〇	〇	〇
SetStemUserBShiftRel	〇	〇	〇	〇	〇
SetTemA1CoarseRel	〇	〇	〇	〇	〇
SetTemDiStigRel	〇	〇	〇	〇	〇
SetTemDShiftRel	〇	〇	〇	〇	〇
SetTemStigA1Rel	〇	〇	〇	〇	〇
SetTiltBal	〇	〇	〇	〇	〇

Detector3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetBrt	〇	〇	〇	〇	〇
GetCont	〇	〇	〇	〇	〇
GetContBrtInfo	〇	〇	〇	〇	×
GetImageSw	〇	〇	〇	〇	〇
GetPosition	〇	〇	〇	〇	〇
GetScreen	〇	〇	〇	〇	〇
SetBrt	〇	〇	〇	〇	〇
SetCont	〇	〇	〇	〇	〇
SetImageSw	〇	〇	〇	〇	〇
SetPosition	〇	〇	〇	〇	〇
SetScreen	〇	〇	〇	〇	〇

EOS3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
DownSelector	〇	〇	〇	〇	〇
DownSpctrSelector	〇	〇	〇	〇	〇
DownStemCamSelector	〇	〇	〇	〇	〇
GetAlpha	〇	〇	〇	〇	〇
GetAlphaSelectorEx	〇	〇	〇	〇	〇
GetBrightnessZoom	〇	〇	〇	〇	〇
GetCurrentMagSelectorID	〇	〇	〇	〇	〇
GetDefocus	〇	×	×	×	×
GetFunctionMode	〇	〇	〇	〇	〇
GetGIF	〇	×	×	×	×
GetMagValue	〇	〇	〇	〇	〇
GetProbeMode	〇	〇	〇	〇	〇
GetSpctrMode	〇	〇	〇	〇	〇
GetSpctrValue	〇	〇	〇	〇	〇
GetSpotSize	〇	〇	〇	〇	〇
GetStemCamValue	〇	〇	〇	〇	〇
GetTemStemMode	〇	〇	〇	〇	〇
SelectFunctionMode	〇	〇	〇	〇	〇
SelectProbMode	〇	〇	〇	〇	〇
SelectSpotSize	〇	〇	〇	〇	〇
SelectTemStem	〇	〇	〇	〇	〇
SetAlphaSelector	〇	〇	〇	〇	〇
SetBrightness	〇	〇	〇	〇	〇
SetBrightnessZoom	〇	〇	〇	〇	〇
SetDiffFocus	〇	〇	〇	〇	〇
SetGIF	〇	〇	〇	〇	〇
SetObjFocus	〇	〇	〇	〇	〇
SetSelector	〇	〇	〇	〇	〇
SetSpctrMode	〇	〇	〇	〇	〇
SetSpctrSelector	〇	〇	〇	〇	〇
SetStemCamSelector	〇	〇	〇	〇	〇
UpSelector	〇	〇	〇	〇	〇
UpSpctrSelector	〇	〇	〇	〇	〇
UpStemCamSelector	〇	〇	〇	〇	〇

FEG3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
ExecAutoFlashing	〇	〇	〇	〇	〇
ExecEmissionOn	〇	〇	〇	〇	〇
GetAutoFlashingStatus	〇	〇	〇	〇	〇
GetBeamValve	〇	〇	〇	〇	〇
GetEmissionOnStatus	〇	〇	〇	〇	〇
GetV1Ready	〇	〇	〇	〇	〇
SetBeamValve	〇	〇	〇	〇	〇
SetFEGEmissionOff	〇	〇	〇	〇	〇

Filter3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetEnergyShift	〇	〇	〇	〇	〇
GetEnergyShiftRange	〇	〇	〇	〇	〇
GetEnergyShiftSw	〇	〇	〇	〇	〇
GetOmegaAutoTune	〇	〇	〇	〇	×
GetSlitPosition	〇	〇	〇	〇	〇
GetSlitWidth	〇	〇	〇	〇	〇
GetSlitWidthRange	〇	〇	〇	〇	〇
OmegaAutoTuneExec	〇	〇	〇	〇	×
SetEnergyShift	〇	〇	〇	〇	〇
SetEnergyShiftRel	〇	〇	〇	〇	〇
SetEnergyShiftSw	〇	〇	×	×	×
SetOmegaAutoTune	〇	〇	〇	〇	×
SetSlitPosition	〇	〇	〇	〇	〇
SetSlitWidth	〇	〇	〇	〇	〇

GUN3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetAnode1CurrentValue	〇	〇	〇	〇	〇
GetAnode2CurrentValue	〇	〇	〇	〇	〇
GetBeamSw	〇	〇	〇	〇	〇
GetBiasCurrentValue	〇	×	×	×	×
GetEmissionCurrentValue	〇	〇	〇	〇	〇
GetFilamentCurrentValue	〇	〇	〇	〇	〇
GetFilamentVal	〇	〇	〇	〇	〇
GetGunTypeEx	〇	×	×	×	×
GetHtCurrentValue	〇	〇	〇	〇	×
GetHtMonitorValue	〇	〇	〇	〇	×
GetHtStts	〇	〇	〇	〇	〇
GetHtTargetValue	〇	〇	〇	〇	×
SetA2Abs	〇	〇	×	〇	×
SetA2Rel	〇	〇	×	〇	×
SetA2Wobbler	〇	〇	×	〇	×
SetBeamSw	〇	〇	〇	〇	〇
SetFilamentVal	〇	〇	〇	〇	〇
SetHtStts	〇	〇	×	〇	×
SetHtWobbler	〇	〇	×	〇	×
SetSelfBias	〇	×	×	×	×

HT3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetHtRange	〇	〇	〇	〇	〇
GetHtValue	〇	〇	〇	〇	〇
SetHtValue	〇	〇	〇	〇	〇

Lens3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetCL1	〇	〇	〇	〇	〇
GetCL2	〇	〇	〇	〇	〇
GetCL3	〇	〇	〇	〇	〇
GetCM	〇	〇	〇	〇	〇
GetFLc	〇	〇	〇	〇	〇
GetFLCInfo	〇	〇	〇	〇	〇
GetFLcomp1	〇	〇	〇	〇	〇
GetFLcomp2	〇	〇	〇	〇	〇
GetFLf	〇	〇	〇	〇	〇
GetIL1	〇	〇	〇	〇	〇
GetIL2	〇	〇	〇	〇	〇
GetIL3	〇	〇	〇	〇	〇
GetIL4	〇	〇	〇	〇	〇
GetLensInfo	〇	〇	〇	〇	〇
GetOLc	〇	〇	〇	〇	〇
GetOLf	〇	〇	〇	〇	×
GetOLSuperFineSw	〇	〇	〇	〇	〇
GetOLSuperFineValue	〇	〇	〇	〇	〇
GetOM	〇	〇	〇	〇	〇
GetOM2	〇	〇	〇	〇	〇
GetOM2Flag	〇	〇	〇	〇	〇
GetPL1	〇	〇	〇	〇	〇
GetPL2	〇	〇	〇	〇	〇
GetPL3	〇	〇	〇	〇	〇
SetCL3	〇	〇	〇	〇	〇
SetDiffFocus	〇	〇	〇	〇	〇
SetFLc	〇	〇	〇	〇	〇
SetFLCAbs	〇	〇	〇	〇	〇
SetFLCRel	〇	〇	〇	〇	〇
SetFLCSw	〇	〇	〇	〇	〇
SetFLCSwAllLens	〇	〇	〇	〇	〇
SetFLf	〇	〇	〇	〇	〇
SetILFocus	〇	〇	〇	〇	〇
SetNtrl	〇	〇	〇	〇	〇
SetOLc	〇	〇	〇	〇	〇
SetOLf	〇	〇	〇	〇	〇
SetOLSuperFineNeutral	〇	〇	〇	〇	〇
SetOLSuperFineSw	〇	〇	〇	〇	〇
SetOLSuperFineValue	〇	〇	〇	〇	〇
SetOM	〇	〇	〇	〇	〇
SetPLFocus	〇	〇	〇	〇	〇
SetStdFocus	〇	〇	×	〇	×

MDS3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
EndMdsMode	〇	〇	〇	〇	〇
GetMdsMode	〇	〇	〇	〇	〇
SetFocusMode	〇	〇	〇	〇	〇
SetPhotosetMode	〇	〇	〇	〇	〇
SetSearchMode	〇	〇	〇	〇	〇

Scan3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetExtScanMode	〇	〇	〇	〇	〇
GetNoiseCancellerVal	〇	〇	〇	〇	〇
GetRotationAngle	〇	〇	〇	〇	〇
GetRotationAngleEx	〇	×	×	×	×
SetExtScanMode	〇	〇	〇	〇	〇
SetRotationAngle	〇	〇	〇	〇	〇
SetRotationAngleEx	〇	×	×	×	×
SetScanDataAbs	〇	〇	〇	〇	〇

VACUUM3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetCameraAir	〇	〇	〇	〇	〇
GetCameraReady	〇	〇	〇	〇	〇
GetColumnAir	〇	〇	〇	〇	〇
GetColumnReady	〇	〇	〇	〇	〇
GetPegInfo	〇	〇	〇	〇	×
GetPigInfo	〇	〇	〇	〇	×
GetSpecimenAir	〇	〇	〇	〇	〇
GetSpecimenPreEvacStart	〇	〇	〇	〇	〇
GetSpecimenReady	〇	〇	〇	〇	〇
GetValveStatus	〇	〇	〇	〇	〇
SetPegMonitorSw	〇	〇	〇	〇	×
SetPigMonitorSw	〇	〇	〇	〇	×

Stage3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
GetAccelAndDclrRate	〇	〇	〇	〇	〇
GetDirection	〇	〇	〇	〇	〇
GetDrvMode	〇	〇	〇	〇	〇
Getf1OverRate	〇	〇	〇	〇	〇
Getf1OverRateTxNum	〇	〇	〇	〇	〇
GetHolderStts	〇	〇	〇	〇	〇
GetMovementValueMeasurementMethod	〇	〇	〇	〇	〇
GetPiezoPosi	〇	〇	〇	〇	〇
GetPos	〇	〇	〇	〇	〇
GetPosEx	〇	×	×	×	×
GetSpeedMode	〇	×	×	×	×
GetSpeedModeEx	〇	×	×	×	×
GetStatus	〇	〇	〇	〇	〇
GetStatusEx	〇	×	×	×	×
SelDrvMode	〇	〇	〇	〇	〇
SetAccelAndDclrRate	〇	〇	〇	〇	〇
Setf1OverRate	〇	〇	〇	〇	〇
Setf1OverRateTxNum	〇	〇	〇	〇	〇
SetMovementValueMeasurementMethod	〇	〇	〇	〇	〇
SetOrg	〇	〇	〇	〇	〇
SetPosition	〇	〇	〇	〇	〇
SetRotation	〇	×	×	×	×
SetRotationRel	〇	×	×	×	×
SetSpeedMode	〇	×	×	×	×
SetSpeedModeEx	〇	×	×	×	×
SetTiltXAngle	〇	〇	〇	〇	〇
SetTiltYAngle	〇	〇	〇	〇	〇
SetTXRel	〇	〇	〇	〇	〇
SetTYRel	〇	〇	〇	〇	〇
SetX	〇	〇	〇	〇	〇
SetXRel	〇	〇	〇	〇	〇
SetY	〇	〇	〇	〇	〇
SetYRel	〇	〇	〇	〇	〇
SetZ	〇	〇	〇	〇	〇
SetZRel	〇	〇	〇	〇	〇
Stop	〇	〇	〇	〇	〇

Nitrogen3

Method	1.3.0.3564	1.2.0.2804	1.1.1.2416	1.1.0.2305	1.0.2.1143
ExecRefill	〇	〇	〇	〇	〇
GetCurrentScenarioStatus	〇	〇	〇	〇	〇
GetLiquidLevel	〇	〇	〇	〇	×
GetMagazineExistStatus	〇	〇	〇	〇	×
GetRefillStatus	〇	〇	〇	〇	×
GetSampleInformation	〇	〇	〇	〇	×
TransferCartridge	〇	〇	〇	〇	×